产品简介
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FPD 检查设备
OTFT Inspection System
本设备是利用高分辨率Line Scan Camera和Review Camera检出Glass不良的Full Auto System装备。
■ 设备规格
| Item | Specification | ||
| AOI | Inspection Camera | 12K TDI Line Scan Camera, CCD : 5um, 200KHz | |
| Inspection Lens | X2~X5 可变Lens | ||
| 分辨率(FOV) | 1um ~ 2.5um (FOV 12mm ~ 30mm) | ||
| Glass Size | Gen2.5 (370mm X 470mm) | ||
| 适用 照明 | Bar Type(W), Coaxial Type(R,G,B,W), BackLight((W) | 高辉度 LED | |
| Review | Review Camera | 5M Color Area Camera, CMOS : 5um | |
| Review Lens | X2, X5, X10, X20, X50 (M Plan Apo) | ||
| Review 分辨率(FOV) | X10 基准 : 0.5um (1.28 X 1.02mm) | ||
| Review 照明 | White LED | 高辉度 LED | |
| CD & Overlay | 精密度 | 3σ ≤ ±0.1um (X50 基准) / 3σ ≤ ±0.25um (X20 基准) | |
| Defect | 检出 Defect | Patterning Defect, Particle, Short, Damage to metal | |
■ 设备特征
利用高速Line Scan Camera获取高分辨率影像
适用Air Floating Stage传送方式，传送稳定
Inline / Stand Alone 等多种型态对应
■ 适用领域
Oxide TFT
■ 检出不良代表Image
| No | 1 | 2 | 3 | 4 | 5 |
| Pattern有 | |||||
| No | 6 | 7 | 8 | 9 | 10 |
| Pattern无 | |||||